The main directions:
- Coherence properties of light wave fields with broad angular and frequency spectra in interferometric optical systems
- Methods of optical measurements of micro-vibrations and micro-deformations of objects with a scattering surface in precision mechanics
- Holographic and speckle-interferometry of the micro-deformation field of scattering objects
- Optical testing of surface and volume micro-structure of randomly inhomogeneous objects
Areas of application:
- micro and nanoelectronics,
- precision instrumentation and engineering,
- semiconductor manufacturing,
- optical production,
- materials science,
- biomedicine,
- etc.
Optical interferometric methods for surface micro-profile testing
- Testing of micro- and nano-relief of surface
- The error test of the macroform
- Testing of the thickness of layers in volume microstructure
Our works:
